An Integrated Auger Electron Spectroscopy, EDS and EBSD System at the Imaging and Chemical Analysis Laboratory (ICAL), MSU-Bozeman part of NNCI Instrument Collection
This Phi 710 NanoAuger Probe is a unique analytical system that includes: 1) Field Emission SEM imaging for spatial resolution down to 5 nanometeers; 2) AES detector for surficial compositional analysis for atomic monolayers on surfaces, with detection of light elements down to Li; 3) Ar-beam ion gun for "dusting off" surfaces of environmental contaminants and depth profiling capabilities; 4) EDS detector for "bulk" compositional analysis and X-ray elemental mapping of materials, and 5) EBSD detector for phase identification using electron diffraction and determination of crystallographic orientation. These numerous analytical methods can be used in near-real-time to fully characterize in situ the identity, crystal structure and orientation, bulk composition, and surface composition of sub-micron to micron particles. Charge compensation methods are used to analyze insulating materials because conducting coats cannot be applied to AES samples.