NanoEarth LEO (Zeiss) 1550 SEM at Virginia Tech
LEO (Zeiss) 1550
- SEM scanning electron microscope
The LEO (Zeiss) 1550 is a high-spatial resolution SEM using a Schottky field emission (FEG) electron source, capable of resolution in 1-5 nm size range using an in-lens SED. It is used for high-resolution imaging of surfaces, qualitative assessment of the distribution of elements (by EDS), submicron structure analysis, and determination of crystal orientation and crystalline texture (by EBSD).
- Accelerating voltage: 100V to 30kV
- Detectors: 1 × In-lens secondary electron (SED), 1 x Everhart-Thornley secondary electron (SED), 1 × Robinson-type back-scatter electron (BSED)
- Secondary & backscattered electrons and x-rays, light (for Cathodoluminescence) and Electron Beam Induced current (EBIC)
- Energy Dispersive X-ray Spectroscopy (EDS): Oxford INCA Energy E2H with INCAx-act 51-1385-005 Silicon Drift detector (SDD), Energy Resolution Mn K – 133eV, detection B - U, 0.1 - 1 at%
- HKL Nordlys II Electron Back Scatter Diffraction (EBSD) system, including a Forward Scatter Electron (FSE) detector
- Spatial resolution
1.0nm at 20kV
2.5nm at 1kV
NOTE: the effectiveness of low Accelerating voltage operation depends heavily on the nature of a sample.
More information and resources for Scanning Electron Microscopy are available on NanoEarth's website.
Conditions for Use:
- Submitted samples will be analyzed on a contract basis (i.e. lab personnel will do the work)
- Visitors are invited to work in the lab to work with lab personnel
- Visitors are invited to work in the lab to design and do the work yourself
- Users who wish to use an NCFL instrument without the supervision of an NCFL instrument specialists must complete the appropriate Training Sessions and become an approved operator. Training Sessions cover instrument operation and safety procedures as well as techniques for obtaining useful information. Training sessions are scheduled by appointment with an instrument specialist and include charges for the instrument and staff time. The total time needed for an individual to show competence on the instrument will be determined by the Instrument Specialist.
Current instrument rates available online: https://www.ncfl.ictas.vt.edu/policies.html
Remote operation is not possible.
Sample preparation is dependent on the specific sample and can be discussed with an instrumentation specialist.
Standard Collections/Lab Blanks:
NanoEarth loves to host groups for demonstrations, workshops, tours, and other educational uses of the lab. Please contact NanoEarth@vt.edu to discuss opportunities.
- Class demonstrations are available for undergraduates
- Class demonstrations are available for K-12
- Undergraduate student research projects are invited
- Graduate student research projects are invited
Support provided by:
The NCFL receives support from the National Science Foundation (NSF) through the National Nanotechnology Coordinated Infrastructure (NNCI) program. NSF support is vital to maintain the high quality of our facility and we strongly ask that you acknowledge their contribution in your publications and presentations that result, in full or part, from using our facilities.
In the case of regular users:
This work was performed in part at the Nanoscale Characterization and Fabrication Laboratory, which is supported by the Virginia Tech National Center for Earth and Environmental Nanotechnology Infrastructure (NanoEarth), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), supported by NSF (ECCS 1542100 and ECCS 2025151).
In the case of users who received financial support (e.g., mini-grants, MUNI):
This work was supported by the Nanoscale Characterization and Fabrication Laboratory and the Virginia Tech National Center for Earth and Environmental Nanotechnology Infrastructure (NanoEarth), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), supported by NSF (ECCS 1542100 and ECCS 2025151).