NanoEarth FEI Quanta 600 FEG SEM at Virginia Tech
FEI Quanta 600 FEG
- SEM scanning electron microscope
FEI Quanta 600 FEG: Environmental SEM equipped with EDS, heating stage, mechanical testing fixture.
The FEI Quanta 600 FEG is an environmental SEM using a Schottky field emission (FEG) electron source that can operate in high-vacuum, low-vacuum and extended-vacuum modes. It is used to image samples that are difficult to impossible to image in standard high vacuum SEMs; the SEM can operate with pressures around the sample up to 4000 Pa and in conjunction with a Peltier stage can image fully hydrated samples, a critical advantage for imaging biological samples. in situ experiments such as hydrating, dehydrating and heating samples are possible with this ESEM.
- Accelerating voltage: 200V to 30kV
- Probe current: up to 100nA continuously adjustable
- Operating pressure: High-vacuum 6 ×10−4 Pa, Low-vacuum 10 to 130 Pa, ESEM-vacuum 10 to 4000 Pa
- Detectors: 1 × Everhart-Thornley SED, 1 × Low-vacuum SED (LFD), 1 × Gaseous SED (GSED), 1 × Solid-state BSED, 1 × Gaseous BSED, 1 × IR-CCD
- Energy Dispersive X-ray Spectroscopy (EDS): Bruker QUANTAX 400 with XFlash 4010 (10mm2)
- Silicon Drift Detector (SDD), Energy Resolution Mn K - 125eV at over 100,000 cps, detection B ~ Am
- Stage Travel: X = Y = 150mm, Z = 65mm (Z clearance 93.5mm), Tilt = -5° to +70° degrees (WD dependent), R = 360° continuous
- Compatible with i) Heating stage ~1000°C and ii) Kammrath Weiss tensile module
- Spatial resolution
1.2nm at 30kV (SE)
2.5nm at 30kV (BSE)
3.0nm at 1kV (SE)
1.5nm at 30kV (SE)
2.5nm at 30kV (BSE)
3.0nm at 3kV (SE)
- Extended vacuum mode (ESEM)
1.5nm at 30kV (SE)
More information and resources for Scanning Electron Microscopy are available on NanoEarth's website.
Conditions for Use:
- Submitted samples will be analyzed on a contract basis (i.e. lab personnel will do the work)
- Visitors are invited to work in the lab to work with lab personnel
- Visitors are invited to work in the lab to design and do the work yourself
- Users who wish to use an NCFL instrument without the supervision of an NCFL instrument specialists must complete the appropriate Training Sessions and become an approved operator. Training Sessions cover instrument operation and safety procedures as well as techniques for obtaining useful information. Training sessions are scheduled by appointment with an instrument specialist and include charges for the instrument and staff time. The total time needed for an individual to show competence on the instrument will be determined by the Instrument Specialist.
Remote operation is not possible.
Sample preparation is dependent on the specific sample and can be discussed with an instrumentation specialist.
Standard Collections/Lab Blanks:
NanoEarth loves to host groups for demonstrations, workshops, tours, and other educational uses of the lab. Please contact NanoEarth@vt.edu to discuss opportunities.
- Class demonstrations are available for undergraduates
- Class demonstrations are available for K-12
- Undergraduate student research projects are invited
- Graduate student research projects are invited
Support provided by:
The NCFL receives support from the National Science Foundation (NSF) through the National Nanotechnology Coordinated Infrastructure (NNCI) program. NSF support is vital to maintain the high quality of our facility and we strongly ask that you acknowledge their contribution in your publications and presentations that result, in full or part, from using our facilities.
In the case of regular users:
This work was performed in part at the Nanoscale Characterization and Fabrication Laboratory, which is supported by the Virginia Tech National Center for Earth and Environmental Nanotechnology Infrastructure (NanoEarth), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), supported by NSF (ECCS 1542100 and ECCS 2025151).
In the case of users who received financial support (e.g., mini-grants, MUNI):
This work was supported by the Nanoscale Characterization and Fabrication Laboratory and the Virginia Tech National Center for Earth and Environmental Nanotechnology Infrastructure (NanoEarth), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), supported by NSF (ECCS 1542100 and ECCS 2025151).