NanoEarth JEOL IT-500HR at Virginia Tech

JEOL IT-500HR

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JEOL IT-500HR SEM at Virginia Tech

Provenance: NanoEarth, Virginia Tech
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JEOL IT-500HR is a newly installed state-of-the-art analytical scanning electron microscope using a Schottky field emission (FEG) electron source. The most attractive features of this instrument are a seamless link from optical to high magnification SEM images and automated large area imaging and spectroscopy analyses. It is also capable of both low acceleration voltage (0.5kV) and high resolution (1.5nm) imaging.

• SEM scanning electron microscope

TECHNICAL SPECIFICATIONS

• Accelerating voltage: 500V to 30kV
• Operating pressure: High-vacuum, Low-vacuum up to 150Pa 
• Detectors: 1 × Everhart-Thornley (SED) for secondary electron imaging, 1 × Multi-segment solid state backscattered electron detector (BSED) for composition, topographic and variable shadow imaging 
• Magnification: ×14 to ×1,680,000 (display 358mm × 269mm) 
• Energy Dispersive X-ray Spectroscopy (EDS): Oxford Instruments, AZtecLive Automated 
• Microanalysis System with UltimMax100 (100mm2) Silicon Drift Detector (SDD), Energy Resolution Mn K - 127eV at 130,000 cps. 
• Surface imaging, analysis and metrology software: Digital Surf- MountainsMap SEM (Contour, Basic 
• Surface Texture, Color Image Overlay, Colocalization, Surface Stitching, SEM) 
• Stage Travel: X= 125mm, Y= 100mm, Z= 5-80mm continuous, Tilt=-10° to +90°, R=360° 
• Compatible with Kammrath Weiss tensile module 
• Spatial resolution 
  • High-Vacuum 
    • 1.5nm at 30kV 
    • 4.0nm at 1kV 
  • Low-vacuum 
    • 1.8nm at 15kV

More information and resources for Scanning Electron Microscopy are available on NanoEarth's website.

Applications include:

• Imaging (size, shape, morphology)

• Submitted samples will be analyzed on a contract basis (i.e. lab personnel will do the work)
• Visitors are invited to work in the lab to work with lab personnel
• Visitors are invited to work in the lab to design and do the work yourself
• Users who wish to use an NCFL instrument without the supervision of an NCFL instrument specialists must complete the appropriate Training Sessions and become an approved operator. Training Sessions cover instrument operation and safety procedures as well as techniques for obtaining useful information. Training sessions are scheduled by appointment with an instrument specialist and include charges for the instrument and staff time. The total time needed for an individual to show competence on the instrument will be determined by the Instrument Specialist.

Equipment rates are available online: https://www.ncfl.ictas.vt.edu/policies.html

Sample preparation is dependent on the specific sample and can be discussed with an instrumentation specialist.

NanoEarth loves to host groups for workshops, tours, and other educational uses of the lab. Please contact NanoEarth@vt.edu to discuss opportunities.

• Class demonstrations are available for undergraduates
• Class demonstrations are available for K-12
• Undergraduate student research projects are invited
• Graduate student research projects are invited

The NCFL receives support from the National Science Foundation (NSF) through the National Nanotechnology Coordinated Infrastructure (NNCI) program. NSF support is vital to maintain the high quality of our facility and we strongly ask that you acknowledge their contribution in your publications and presentations that result, in full or part, from using our facilities.

In the case of regular users:

This work was performed in part at the Nanoscale Characterization and Fabrication Laboratory, which is supported by the Virginia Tech National Center for Earth and Environmental Nanotechnology Infrastructure (NanoEarth), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), supported by NSF (ECCS 1542100 and ECCS 2025151).

In the case of users who received financial support (e.g., mini-grants, MUNI):

This work was supported by the Nanoscale Characterization and Fabrication Laboratory and the Virginia Tech National Center for Earth and Environmental Nanotechnology Infrastructure (NanoEarth), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), supported by NSF (ECCS 1542100 and ECCS 2025151).